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Etching-assisted femtosecond laser microfabrication<xref rid="cpb_27_9_094212fn1" ref-type="fn">*</xref><fn id="cpb_27_9_094212fn1"><label>*</label><p>Project supported by the National Natural Science Foundation of China (Grant No. 51501070).</p></fn>
3D microfabrication by applying the laser-induced bubble method to the thermoset polymer PDMS using a conventional nanosecond laser
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